As an important part of the chip, MOSFET plays a vital role in integrated circuits, but with the continuous reduction of chip size, the energy consumption problem that cannot be ignored has been paid attention to, and TFET came into being. Thanks to its special tunneling mechanism, it can operate at low voltages and has lower leakage currents. This paper illustrates the basic principles of MOSFET and TFET, and uses tables and elaboration methods to intuitively show that TFET has more advantages in terms of short channel effect, subthreshold swing and switching speed. However, in industrial manufacturing, MOSFETs have more mature and stable processes, which is often one of the main factors affecting yield. Therefore, it can be concluded that MOSFETs will continue to be one of the major periods in the recent industrialization process, and MOSFETs have a more mature process and more stable performance for device manufacturing. However, TFET has great potential in terms of energy consumption, so the research and process improvement of TFET will also be one of the main research tasks in the future.
