Microelectromechanical systems (MEMS) are critical in advancing modern robotics by offering compact, low-power, and high-precision solutions. This paper explores the frontier applications of MEMS in robotics, focusing on key areas such as motion control, environmental sensing, and future technological integration with artificial intelligence (AI). MEMS sensors and actuators have significantly improved the precision and efficiency of robots in various industries, including autonomous vehicles, industrial automation, and medical robotics. The combination of MEMS and AI opens new possibilities for autonomous decision-making and adaptive robotics, while micro-robots equipped with MEMS hold great potential in fields like biomedicine. The results of this study show that MEMS devices significantly enhance robots‘ adaptability in dynamic environments, and their integration with AI can lead to greater autonomy. Moreover, the research suggests that MEMS-based micro-robots could revolutionize precision surgery and drug delivery applications. This paper highlights MEMS technology’s current state and prospects in revolutionizing robotics.
